Development and Use of Small Addressable Arrays for Process Window Monitoring in 65nm Manufacturing

Author

Karthikeyan, Madurakavi ; Gasasira, A. ; Fox, S. ; Yeric, Greg ; Hall, Mathew

Author_Institution

IBM, Hopewell

fYear

2007

fDate

19-22 March 2007

Firstpage

135

Lastpage

139

Abstract

In this paper we report on the development and use of two scribe-line compatible addressable array test structures in 65 nm technology for routine process window monitoring. One array was dedicated for front-end of line test structures, while a second consists exclusively of back-end test structures. Fast testing allows large-scale sampling of wafer lots in a manufacturing environment. Customized software is used to automate data analysis and calculate figures of merit that enable process and equipment performance to be tracked by process module. Examples of successful application of these arrays in identifying and addressing systematic yield detractors are provided.

Keywords

arrays; integrated circuit design; integrated circuit manufacture; integrated circuit technology; integrated circuit testing; integrated circuit yield; large scale integration; process monitoring; automate data analysis; back-end test structures; customized software; figures of merit calculation; front-end test structures; large-scale sampling; process window monitoring; scribe-line compatible addressable array test structures; semiconductor defects; semiconductor device manufacturing environment; size 65 nm; systematic yield detractors; yield optimization; Circuit testing; Manufacturing processes; Microelectronics; Monitoring; Phased arrays; Probes; Read only memory; Semiconductor device manufacture; System testing; USA Councils; Process monitoring; Semiconductor defects; Semiconductor device manufacture; Yield optimization;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Test Structures, 2007. ICMTS '07. IEEE International Conference on

Conference_Location

Tokyo

Print_ISBN

1-4244-0781-8

Electronic_ISBN

1-4244-0781-8

Type

conf

DOI

10.1109/ICMTS.2007.374470

Filename

4252420