Automated on-wafer characterization in micro-machined resonators: towards an integrated test vehicle for bulk acoustic wave resonators (FBAR)

Author

Campanella, Humberto ; Nouet, Pascal ; De Paco, Pedro ; Uranga, Arantxa ; Barniol, Nuria ; Esteve, Jaume

Author_Institution

Centra Nacional de Microelectron, Bellaterra

fYear

2007

fDate

19-22 March 2007

Firstpage

157

Lastpage

161

Abstract

Electrical on-wafer characterization in FBAR is automated by means of a wide-band parameter extraction algorithm, in order to define a complete characterization vehicle for FBAR and MEMS resonators. A model of FBAR-substrate losses is proposed and an automation algorithm implementing a multi-step least-squares strategy is presented. Extraction of the equivalent-circuit parameters is performed from experimental s-parameter data acquired by a microwave network analyzer. The results of FBAR and substrate characterization are presented, and the basis of an integrated test vehicle is discussed.

Keywords

S-parameters; automatic test equipment; bulk acoustic wave devices; equivalent circuits; least squares approximations; micromechanical resonators; microwave measurement; network analysers; semiconductor device measurement; MEMS resonators; S-parameter; automated on-wafer characterization; bulk acoustic wave resonators; equivalent circuit parameters; micromachined resonators; microwave network analyzer; multistep least-squares strategy; wide-band parameter extraction; Acoustic testing; Acoustic waves; Automatic testing; Automation; Data mining; Film bulk acoustic resonators; Micromechanical devices; Parameter extraction; Vehicles; Wideband; Thin-film bulk acoustic wave resonators; automatic testing; equivalent circuits; parameter extraction;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Test Structures, 2007. ICMTS '07. IEEE International Conference on

Conference_Location

Tokyo

Print_ISBN

1-4244-0781-8

Electronic_ISBN

1-4244-0781-8

Type

conf

DOI

10.1109/ICMTS.2007.374474

Filename

4252424