DocumentCode :
2887218
Title :
Reducing AC impedance measurement errors caused by the DC voltage dependence of broadband high-voltage bias-tees
Author :
Tiggelman, M.P.J. ; Reimann, K. ; Schmitz, J.
Author_Institution :
Twente Univ., Enschede
fYear :
2007
fDate :
19-22 March 2007
Firstpage :
200
Lastpage :
205
Abstract :
During the AC impedance characterization of devices, from the kHz-range up to the GHz-range, accuracy can be lost when a DC voltage is applied. Commercial high-voltage broadband bias-tees are often voltage-dependent, which can cause inaccuracies at low frequencies. A calibration technique with applied bias significantly improves the measurement accuracy. Additionally, a bias-tee has been developed with a voltage-independent capacitor, suitable for DC voltages up to 500 V showing excellent performance up to several gigahertz. PIN diode limiters protect the measurement equipment from damage in case of a device breakdown.
Keywords :
capacitors; electron device testing; measurement errors; multiplexing equipment; p-i-n diodes; AC impedance measurement errors; DC voltage dependence; PIN diode limiters; broadband high-voltage bias-tees; device breakdown; voltage-independent capacitor; Calibration; Capacitors; Dielectric measurements; Frequency; Impedance measurement; Inductors; Protection; Resistors; Voltage; Wideband;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronic Test Structures, 2007. ICMTS '07. IEEE International Conference on
Conference_Location :
Tokyo
Print_ISBN :
1-4244-0781-8
Electronic_ISBN :
1-4244-0781-8
Type :
conf
DOI :
10.1109/ICMTS.2007.374483
Filename :
4252433
Link To Document :
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