Title : 
Reducing AC impedance measurement errors caused by the DC voltage dependence of broadband high-voltage bias-tees
         
        
            Author : 
Tiggelman, M.P.J. ; Reimann, K. ; Schmitz, J.
         
        
            Author_Institution : 
Twente Univ., Enschede
         
        
        
        
        
        
            Abstract : 
During the AC impedance characterization of devices, from the kHz-range up to the GHz-range, accuracy can be lost when a DC voltage is applied. Commercial high-voltage broadband bias-tees are often voltage-dependent, which can cause inaccuracies at low frequencies. A calibration technique with applied bias significantly improves the measurement accuracy. Additionally, a bias-tee has been developed with a voltage-independent capacitor, suitable for DC voltages up to 500 V showing excellent performance up to several gigahertz. PIN diode limiters protect the measurement equipment from damage in case of a device breakdown.
         
        
            Keywords : 
capacitors; electron device testing; measurement errors; multiplexing equipment; p-i-n diodes; AC impedance measurement errors; DC voltage dependence; PIN diode limiters; broadband high-voltage bias-tees; device breakdown; voltage-independent capacitor; Calibration; Capacitors; Dielectric measurements; Frequency; Impedance measurement; Inductors; Protection; Resistors; Voltage; Wideband;
         
        
        
        
            Conference_Titel : 
Microelectronic Test Structures, 2007. ICMTS '07. IEEE International Conference on
         
        
            Conference_Location : 
Tokyo
         
        
            Print_ISBN : 
1-4244-0781-8
         
        
            Electronic_ISBN : 
1-4244-0781-8
         
        
        
            DOI : 
10.1109/ICMTS.2007.374483