DocumentCode :
2887398
Title :
A Transmission-Line Based Technique for De-Embedding Noise Parameters
Author :
Yau, Kenneth H K ; Mangan, Alain M. ; Chevalier, P. ; Schvan, P. ; Voinigescu, Sorin P.
Author_Institution :
Toronto Univ., Toronto
fYear :
2007
fDate :
19-22 March 2007
Firstpage :
237
Lastpage :
242
Abstract :
A transmission line-based de-embedding technique for on-wafer S-parameter measurements is extended to the noise parameters of MOSFETs and HBTs. Since it accounts for the distributed effects of interconnect lines and for the pad-interconnect discontinuity, it is expected to yield more accurate results at high frequencies than existing approaches. Furthermore, by requiring only two transmission line test structures to de-embed all test structures in a (Bi)CMOS process, it is one of the most area-efficient. Experimental validation is provided on SiGe HBTs and on 90 nm and 130 nm n-MOSFETs and its accuracy is compared with that of other lumped or distributed de-embedding techniques.
Keywords :
MOSFET; S-parameters; heterojunction bipolar transistors; semiconductor device measurement; semiconductor device noise; transmission lines; BiCMOS process; HBT; MOSFET; distributed effects; noise parameters deembedding; on-wafer S-parameter measurement; pad-interconnect discontinuity; size 130 nm; size 90 nm; transmission-line based technique; Frequency; Germanium silicon alloys; MOSFETs; Noise measurement; Scattering parameters; Silicon germanium; Testing; Transmission line discontinuities; Transmission line measurements; Transmission lines;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronic Test Structures, 2007. ICMTS '07. IEEE International Conference on
Conference_Location :
Tokyo
Print_ISBN :
1-4244-0781-8
Electronic_ISBN :
1-4244-0781-8
Type :
conf
DOI :
10.1109/ICMTS.2007.374491
Filename :
4252441
Link To Document :
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