DocumentCode
2887942
Title
About phase components of differential-phase LBIC from p-n junction transversal plane scanning
Author
Ilchenko, L.N. ; Kolenov, S.O. ; Litvinenko, S.V. ; Molochko, P.V.
Author_Institution
Taras Shevchenko Nat. Univ. of Kyiv, Kiev, Ukraine
fYear
2010
fDate
12-14 Sept. 2010
Firstpage
195
Lastpage
197
Abstract
Theoretical model of how LBIC signal from p-n junction being scanned by two laser beams is formed was proposed. Physical effects which make impact in overall phase of the LBIC signal were pointed out. Experimental research of illuminating surface of laser diode was conducted. Experimental dependencies of the phase of LBIC signal on the coordinate of scanning laser beams were obtained. Possibilities of how differential-phase method can be used to inspect semiconductor surfaces with p-n junctions were analyzed.
Keywords
OBIC; p-n junctions; semiconductor lasers; differential-phase LBIC; laser diode; p-n junction transversal plane scanning; phase components; scanning laser beams; semiconductor surfaces; Diode lasers; Laser beams; Laser modes; Laser theory; P-n junctions; Semiconductor lasers; Surface impedance;
fLanguage
English
Publisher
ieee
Conference_Titel
Laser and Fiber-Optical Networks Modeling (LFNM), 2010 10th International Conference on
Conference_Location
Sevastopol
Print_ISBN
978-1-4244-6994-9
Type
conf
DOI
10.1109/LFNM.2010.5624200
Filename
5624200
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