Thermal modeling of novel monolithic pyroelectric infrared image sensors

Author

Matin, A. ; Sugai, T. ; Kawazu, N. ; Akai, D. ; Sawada, K. ; Ishida, M.

Author_Institution

Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Technol., Toyohashi, Japan

fYear

2010

fDate

2-5 June 2010

Firstpage

1

Lastpage

7

Abstract

In this paper, we present designing, fabrication and thermal simulation of smart 1024-element (32 × 32) monolithic pyroelectric infrared image sensors. A sol-gel deposited PZT(001) thin film was used as a pyroelectric material. We tailored the geometries and dimensions of devices in designing smart image sensors. The influence of thermal isolator has shown to significantly reduce the heat loss to the device structure and environment. Introducing circular type pixels instead of rectangular type ones, has confirmed to obtain an optimal design of smart image sensor, with the maximal temperature change of 4 mK at a response frequency of 10 Hz.

Keywords

image sensors; infrared detectors; intelligent sensors; piezoelectric thin films; pyroelectric detectors; frequency 10 Hz; geometries; maximal temperature change; monolithic pyroelectric infrared image sensors; pyroelectric material; smart image sensors; sol-gel deposition; temperature 4 mK; thermal isolator; thermal modeling; thermal simulation; Fabrication; Frequency; Geometry; Image sensors; Infrared image sensors; Isolators; Pyroelectricity; Smart pixels; Sputtering; Temperature sensors; epitaxial; micromachining; monolithic; pyroelectric image sensor; sol-gel; thermal modeling; thin-film;

fLanguage

English

Publisher

ieee

Conference_Titel

Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm), 2010 12th IEEE Intersociety Conference on

Conference_Location

Las Vegas, NV

ISSN

1087-9870

Print_ISBN

978-1-4244-5342-9

Electronic_ISBN

1087-9870

Type

conf

DOI

10.1109/ITHERM.2010.5501316

Filename

5501316