Title :
Thermal modeling of novel monolithic pyroelectric infrared image sensors
Author :
Matin, A. ; Sugai, T. ; Kawazu, N. ; Akai, D. ; Sawada, K. ; Ishida, M.
Author_Institution :
Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Technol., Toyohashi, Japan
Abstract :
In this paper, we present designing, fabrication and thermal simulation of smart 1024-element (32 × 32) monolithic pyroelectric infrared image sensors. A sol-gel deposited PZT(001) thin film was used as a pyroelectric material. We tailored the geometries and dimensions of devices in designing smart image sensors. The influence of thermal isolator has shown to significantly reduce the heat loss to the device structure and environment. Introducing circular type pixels instead of rectangular type ones, has confirmed to obtain an optimal design of smart image sensor, with the maximal temperature change of 4 mK at a response frequency of 10 Hz.
Keywords :
image sensors; infrared detectors; intelligent sensors; piezoelectric thin films; pyroelectric detectors; frequency 10 Hz; geometries; maximal temperature change; monolithic pyroelectric infrared image sensors; pyroelectric material; smart image sensors; sol-gel deposition; temperature 4 mK; thermal isolator; thermal modeling; thermal simulation; Fabrication; Frequency; Geometry; Image sensors; Infrared image sensors; Isolators; Pyroelectricity; Smart pixels; Sputtering; Temperature sensors; epitaxial; micromachining; monolithic; pyroelectric image sensor; sol-gel; thermal modeling; thin-film;
Conference_Titel :
Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm), 2010 12th IEEE Intersociety Conference on
Conference_Location :
Las Vegas, NV
Print_ISBN :
978-1-4244-5342-9
Electronic_ISBN :
1087-9870
DOI :
10.1109/ITHERM.2010.5501316
