DocumentCode :
2889200
Title :
Bringing the `S´ back into statistical process control
Author :
Sredni, J.
Author_Institution :
Resource Optimization Inst., Palo Alto, CA, USA
fYear :
1989
fDate :
22-24 May 1989
Firstpage :
34
Lastpage :
40
Abstract :
The author discusses statistical process control presenting many graphics
Keywords :
integrated circuit manufacture; statistical process control; graphics; statistical process control; Force measurement; Information analysis; Performance analysis; Process control; Quality control; Quality management; Resource management; Signal analysis; Signal design; Statistical analysis;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing Science Symposium, 1989. ISMSS 1989., IEEE/SEMI International
Conference_Location :
Burlingame, CA
Type :
conf
DOI :
10.1109/ISMSS.1989.77240
Filename :
77240
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2889200
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