A production fab defect reduction program

The author describes a defect reduction program in a production manufacturing environment and shows how the need for lower defect levels was translated into a program with measurable cost and yield benefits. This program has several significant elements: a visual defect inspection program, the use of statistical process control, the use of direct electronic data collection for a laser particle counter program, and the use of an electronic defect monitor. The results have been positive and have resulted in lower die costs for this wafer fabrication process