Title :
A CMOS-Based Capacitive Sensor for Laboratory-On-Chips: Design and Experimental Results
Author :
Ghafar-Zadeh, Ebrahim ; Sawan, Mohamad
Author_Institution :
Dept. of Electr. Eng., Ecole Polytechnique de Montreal, Que.
Abstract :
In this paper, we present a charge-based interface circuit to detect minute capacitance changes for laboratory-on-chip applications. The interface circuits and sensing electrodes are implemented in 0.18 mum CMOS process. We describe the circuit design and then put forward simulation results. We also demonstrate and discuss the measurement results of fabricated capacitive sensor. These measurements reveal a high precision detection of sensing capacitance as less as 1 fF.
Keywords :
CMOS image sensors; capacitance measurement; capacitive sensors; lab-on-a-chip; 0.18 micron; CMOS process; CMOS-based capacitive sensor; capacitance measurement; charge-based interface circuit; laboratory-on-chips; CMOS process; Capacitance measurement; Capacitive sensors; Circuits; Electrodes; Equations; Lab-on-a-chip; Laboratories; Pulsed power supplies; Semiconductor device measurement;
Conference_Titel :
Circuits and Systems, 2007. ISCAS 2007. IEEE International Symposium on
Conference_Location :
New Orleans, LA
Print_ISBN :
1-4244-0920-9
Electronic_ISBN :
1-4244-0921-7
DOI :
10.1109/ISCAS.2007.378188
