Electrodeposition of diamond-like carbon thin film on conductive indium-tin-oxide glass substrate

Author

Ching-Tsang Chang ; Yi-Tsung Chang ; Yun-Jhung Chih ; Herng-Yih Ueng

Author_Institution

Dept. of Electr. Eng., Nat. Sun Yat-sen Univ., Kaohsiung, Taiwan

fYear

2015

fDate

4-6 May 2015

Firstpage

1

Lastpage

3

Abstract

This paper presents electrodeposition of diamond-like carbon (DLC) thin film deposits on indium tin oxide (ITO) glass substrate under voltage 2.1V~120V with mixing varying acetic acids´ portions with deionized water, forming 0.2~0.8% electrolytic solutions. The result shows that at deposition temperature 30°~65°, voltage 50V and 0.8% electrolytic solution concentration of DLC thin films, the reflection index reduced to 60%, and theoretical matching refractive index became 1.32. This finding is applicable on various optoelectronic device like protective or window layer of solar cell.

Keywords

diamond-like carbon; electrodeposition; electrolysis; refractive index; thin films; C; DLC thin films; ITO-SiO₂; acetic acids; conductive indium-tin-oxide glass substrate; deionized water; diamond-like carbon thin film; electrodeposition; electrolytic solution concentration; optoelectronic device-like protective layer; optoelectronic device-like window layer; reflection index; solar cell; Electric potential; Films; Glass; Indium tin oxide; Reflection; Scanning electron microscopy; Substrates; anti-reflective layer; diamond-like carbon; electrodeposition; indium tin oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Next-Generation Electronics (ISNE), 2015 International Symposium on

Conference_Location

Taipei

Type

conf

DOI

10.1109/ISNE.2015.7131998

Filename

7131998