DocumentCode

2891794

Title

Fabrication of Silicon Microlenses

Author

Eisner, M. ; Schwider, J.

fYear

1996

fDate

8-13 Sept. 1996

Firstpage

258

Lastpage

258

Keywords

Dry etching; Fabrication; Lenses; Microoptics; Optical fiber communication; Resists; Rough surfaces; Silicon; Surface roughness; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-optics Europe, 1996. CLEO/Europe., Conference on

Conference_Location

Hamburg, Germany

Print_ISBN

0-7803-3169-9

Type

conf

DOI

10.1109/CLEOE.1996.562439

Filename

562439