Title :
Fabrication of Silicon Microlenses
Author :
Eisner, M. ; Schwider, J.
Keywords :
Dry etching; Fabrication; Lenses; Microoptics; Optical fiber communication; Resists; Rough surfaces; Silicon; Surface roughness; Wet etching;
Conference_Titel :
Lasers and Electro-optics Europe, 1996. CLEO/Europe., Conference on
Conference_Location :
Hamburg, Germany
Print_ISBN :
0-7803-3169-9
DOI :
10.1109/CLEOE.1996.562439
