Modeling of the low energy electron dust particle removing system in enclosures

A dust particle removing system based on a low energy electron shower has been investigated theoretically. In the semiconductor, medical and pharmaceutical industries, it is desirable to generate dust free environments in a closed environment for wide gas pressure ranges. In this work, the authors develop a model to calculate dust particle removal rate in a rectangular box equipped with electron emission electrodes with and without external electric fields under a wide range of gas pressure. The dust particle in the system is charged by low energy electrons emitted thermally or optically. The results show that dust particles are effectively charged by electrons even under the reduced gas pressures and the rate of dust particle removal is substantially enhanced by an external electric field. Results for the time-dependent dust particle distribution and removal rate are presented