• DocumentCode
    2895986
  • Title

    Linear Interpolation of Periodic 633nm in Heterodyne Laser Interferometer for Subnanometer Dimensional Measurement

  • Author

    Tanaka, M. ; Yamagami, T. ; Nakayama, K.

  • Author_Institution
    Research Laboratory of Metrology
  • fYear
    1988
  • fDate
    7-10 June 1988
  • Firstpage
    131
  • Lastpage
    132
  • Abstract
    The heterodyne laser interferometry is discussed on its accuracy in the subnanometer range for precision dimensional measurement. Simplest optical nonpolarization heterodyne interferometer is tried experimentally in order to eliminate the leakage between reference and measuring optical signal and show that the accuracy around 0.1 nm is achieved.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Precision Electromagnetic Measurements, 1988. CPEM 88 Digest. 1988 Conference on
  • Conference_Location
    Ibaraki, Japan
  • Type

    conf

  • DOI
    10.1109/CPEM.1988.671216
  • Filename
    671216
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2895986