Title :
Optical FM Heterodyne Interferometry For Range And Displacement Measurements
Author :
Kobayashi, T. ; Jiang Shudong
Author_Institution :
Fukui University
Abstract :
A novel technique of frequency modulated ( FM ) heterodyne interferometer has been realized for measuring remotely the range and the displacement of both specular reflectors and diffuse surface objects using a FM semiconductor laser. The resolution better than 7 um was realized for the range measurement and about 1 nm for the displacement measurement with specular targets for ranges to about 2 m.
Conference_Titel :
Precision Electromagnetic Measurements, 1988. CPEM 88 Digest. 1988 Conference on
Conference_Location :
Ibaraki, Japan
DOI :
10.1109/CPEM.1988.671217
