DocumentCode
2896001
Title
Optical FM Heterodyne Interferometry For Range And Displacement Measurements
Author
Kobayashi, T. ; Jiang Shudong
Author_Institution
Fukui University
fYear
1988
fDate
7-10 June 1988
Firstpage
133
Lastpage
134
Abstract
A novel technique of frequency modulated ( FM ) heterodyne interferometer has been realized for measuring remotely the range and the displacement of both specular reflectors and diffuse surface objects using a FM semiconductor laser. The resolution better than 7 um was realized for the range measurement and about 1 nm for the displacement measurement with specular targets for ranges to about 2 m.
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements, 1988. CPEM 88 Digest. 1988 Conference on
Conference_Location
Ibaraki, Japan
Type
conf
DOI
10.1109/CPEM.1988.671217
Filename
671217
Link To Document