DocumentCode
2897348
Title
Real analysis of residual gas in electrical tube
Author
Mei Xiao ; Xiaobing Zhang
Author_Institution
Sch. of Electron. Sci. & Eng., Southeast Univ., Nanjing, China
fYear
2012
fDate
24-26 April 2012
Firstpage
83
Lastpage
84
Abstract
With the feature of small vacuum chamber and resistant over 450°C baking in vacuum, micro-chamber quadruple mass spectrometer (MCQMS) can seal together with the tube and seal off after the same exhaust process. Thus the residual gas composition within the tube can be monitored truly in the process of entire life of tube. In this paper, the results of analyzing the residual gas by using of MCQMS instead of conventional quadruple mass spectrometry were given.
Keywords
chemical analysis; mass spectrometers; vacuum tubes; MCQMS; electrical tube; microchamber quadruple mass spectrometer; residual gas; small vacuum chamber; Anodes; Cathodes; Electron tubes; Gases; Gettering; Heating; Ionization; quadruple mass spectrometer; residual gas; tube;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Electronics Conference (IVEC), 2012 IEEE Thirteenth International
Conference_Location
Monterey, CA
Print_ISBN
978-1-4673-0188-6
Electronic_ISBN
978-1-4673-0187-9
Type
conf
DOI
10.1109/IVEC.2012.6262084
Filename
6262084
Link To Document