DocumentCode
2898013
Title
A novel nondestructive method for the characterization of ion-implanted waveguides
Author
Guarino, Andrea ; Günter, Peter
Author_Institution
Nonlinear Opt. Lab., Swiss Fed. Inst. of Technol., Zurich, Switzerland
fYear
2005
fDate
12-17 June 2005
Firstpage
297
Abstract
In this paper, we present the barrier-coupling method as a novel nondestructive technique to characterize ion-implanted planar waveguides. We have also developed a simple theoretical model to describe the coupling process, based on the plane-wave expansion of an incoming Gaussian beam. The model confirms experimental observations about coupling efficiency and dependence on beam dimensions, which is useful to optimize the measurement.
Keywords
ion implantation; optical fabrication; optical planar waveguides; optical testing; Gaussian beam; barrier-coupling method; coupling efficiency; ion-implanted planar waveguide characterization; nondestructive method; plane-wave expansion; Nonlinear optics; Optical coupling; Optical planar waveguides; Optical propagation; Optical refraction; Optical variables control; Optical waveguide components; Optical waveguides; Particle beam optics; Planar waveguides;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe, 2005. CLEO/Europe. 2005 Conference on
Print_ISBN
0-7803-8974-3
Type
conf
DOI
10.1109/CLEOE.2005.1568081
Filename
1568081
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