• DocumentCode
    2898046
  • Title

    Blue-light emission from sputtered Ti:SiO2 films without annealing

  • Author

    Hanaizumi, Osamu ; Ono, Kazutaka ; Ogawa, Yuichi ; Matsumoto, Toshiaki

  • Author_Institution
    Dept. of Electron. Eng., Gunma Univ., Japan
  • fYear
    2005
  • fDate
    12-17 June 2005
  • Firstpage
    299
  • Abstract
    In this report, we found that Ti:SiO2 co-sputtered films could emit blue light at room temperature without annealing. Ti:SiO2 films were deposited on fused SiO2 substrates by using an rf-sputtering apparatus and we used one to two Ti tablets placed on SiO2 plate as a target.
  • Keywords
    optical fabrication; optical films; photoluminescence; silicon compounds; sputtering; titanium; 293 to 298 K; SiO2; SiO2:Ti; Ti:SiO2 co-sputtered film deposition; blue-light emission; rf-sputtering; Annealing; Energy measurement; Temperature measurement; Wavelength measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Europe, 2005. CLEO/Europe. 2005 Conference on
  • Print_ISBN
    0-7803-8974-3
  • Type

    conf

  • DOI
    10.1109/CLEOE.2005.1568083
  • Filename
    1568083
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2898046