Title :
A Generic Test Structure Heater Design And Characterization
Author :
Messick, Cleston Ray ; Turner, Timothy E.
Author_Institution :
National Semiconductor
Keywords :
Automatic testing; Current measurement; Electrical resistance measurement; Pollution measurement; Probes; Semiconductor device testing; Stress measurement; Temperature measurement; Threshold voltage; Voltage measurement;
Conference_Titel :
Wafer Level Reliability Workshop, 1992. Final Report., 1992 International
Conference_Location :
Lake Tahoe, CA, USA
DOI :
10.1109/IWLR.1992.657988
