• DocumentCode
    2899165
  • Title

    ICMTS 92. Proceedings of the 1992 International Conference on Microelectronic Test Structures (Cat. No.92CH3102-1)

  • fYear
    1992
  • fDate
    16-19 March 1992
  • Abstract
    Presents the cover from the proceedings of this conference.
  • Keywords
    circuit reliability; integrated circuit technology; integrated circuit testing; monolithic integrated circuits; semiconductor device models; semiconductor process modelling; capacitance measurement extraction; defect analysis; device measurements; dimensional measurements; hot carrier reliability issues; modeling; parameter extraction; process characterization; reliability prediction; test structures; yield management;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Test Structures, 1992. ICMTS 1992. Proceedings of the 1992 International Conference on
  • Conference_Location
    San Diego, CA, USA
  • Print_ISBN
    0-7803-0535-3
  • Type

    conf

  • DOI
    10.1109/ICMTS.1992.185919
  • Filename
    185919