DocumentCode
2899495
Title
New failure analysis technique of ULSIs using photon emission method
Author
Uraoka, Y. ; Maeda, T. ; Miyanaga, I. ; Tsuji, K.
Author_Institution
Matsushita Electric Ind. Co.b Ltd., Osaka, Japan
fYear
1992
fDate
16-19 Mar 1992
Firstpage
100
Lastpage
105
Abstract
The technique detects the failure of ULSIs operating in real time. This technique was realized by combining a photodetection system with a LSI tester. By this combination, arbitrary blocks in the LSI chip can be biased with real signals intentionally; hence, the ability to detect failures is greatly enhanced
Keywords
VLSI; failure analysis; integrated circuit testing; photoemission; LSI tester; ULSIs; arbitrary blocks; failure analysis technique; photodetection system; photon emission method; real signals; Central Processing Unit; Circuit testing; Delay; Failure analysis; Large scale integration; Optical filters; Signal generators; System testing; Test pattern generators; Ultra large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 1992. ICMTS 1992. Proceedings of the 1992 International Conference on
Conference_Location
San Diego, CA
Print_ISBN
0-7803-0535-3
Type
conf
DOI
10.1109/ICMTS.1992.185947
Filename
185947
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