Title :
New failure analysis technique of ULSIs using photon emission method
Author :
Uraoka, Y. ; Maeda, T. ; Miyanaga, I. ; Tsuji, K.
Author_Institution :
Matsushita Electric Ind. Co.b Ltd., Osaka, Japan
Abstract :
The technique detects the failure of ULSIs operating in real time. This technique was realized by combining a photodetection system with a LSI tester. By this combination, arbitrary blocks in the LSI chip can be biased with real signals intentionally; hence, the ability to detect failures is greatly enhanced
Keywords :
VLSI; failure analysis; integrated circuit testing; photoemission; LSI tester; ULSIs; arbitrary blocks; failure analysis technique; photodetection system; photon emission method; real signals; Central Processing Unit; Circuit testing; Delay; Failure analysis; Large scale integration; Optical filters; Signal generators; System testing; Test pattern generators; Ultra large scale integration;
Conference_Titel :
Microelectronic Test Structures, 1992. ICMTS 1992. Proceedings of the 1992 International Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-0535-3
DOI :
10.1109/ICMTS.1992.185947
