A high-speed TEG evaluation system integrating parallel/continuous processing software and high-speed hardware

Author

Kubota, Katsutoshi ; Takeda, Tadao ; Sakurai, Tetsuma

Author_Institution

NTT LSI Lab., Kanagawa, Japan

fYear

1992

fDate

16-19 Mar 1992

Firstpage

150

Lastpage

155

Abstract

At the LSI process development stage, fabrication, and evaluation of a test element group (TEG) are repeatedly carried out to obtain optimum fabrication conditions. A high-speed TEG evaluation system was developed. By combining (1) a high-speed database with suitable indexes formed on a database machine, (2) a means of inputting data in parallel with measurements, and (3) a specialized measurement instrument equipped with an analog feedback unit for high-speed measurement, a fivefold increase in TEG evaluation speed was obtained

Keywords

automatic testing; integrated circuit testing; large scale integration; production testing; LSI process development; TEG evaluation system; analog feedback unit; database machine; measurement instrument; optimum fabrication conditions; parallel/continuous processing software; test element group; Data processing; Database machines; Fabrication; Fluid flow measurement; Hardware; Indexes; Instruments; Software measurement; Velocity measurement; Workstations;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Test Structures, 1992. ICMTS 1992. Proceedings of the 1992 International Conference on

Conference_Location

San Diego, CA

Print_ISBN

0-7803-0535-3

Type

conf

DOI

10.1109/ICMTS.1992.185958

Filename

185958