DocumentCode
2899769
Title
Sensor-Based Control for Semiconductor Manufacturing Plasma EtchingAsA ProcessVehicle
Author
Terry, F.L., Jr. ; Freudenberg, J. ; Elta, M. ; Giles, M. ; Grizzle, J. ; Lafortune, S. ; Kabamba, P. ; Khargonekar, P. ; Meerkov, S. ; Teneketzis, D.
fYear
1992
fDate
25-28 Oct. 1992
Firstpage
106
Lastpage
116
Keywords
Automatic generation control; Control systems; Etching; Fabrication; Manufacturing processes; Plasma applications; Plasma materials processing; Process control; Real time systems; Semiconductor device manufacture;
fLanguage
English
Publisher
ieee
Conference_Titel
Wafer Level Reliability Workshop, 1992. Final Report., 1992 International
Conference_Location
Lake Tahoe, CA, USA
Type
conf
DOI
10.1109/IWLR.1992.657992
Filename
657992
Link To Document