DocumentCode :
2899769
Title :
Sensor-Based Control for Semiconductor Manufacturing Plasma EtchingAsA ProcessVehicle
Author :
Terry, F.L., Jr. ; Freudenberg, J. ; Elta, M. ; Giles, M. ; Grizzle, J. ; Lafortune, S. ; Kabamba, P. ; Khargonekar, P. ; Meerkov, S. ; Teneketzis, D.
fYear :
1992
fDate :
25-28 Oct. 1992
Firstpage :
106
Lastpage :
116
Keywords :
Automatic generation control; Control systems; Etching; Fabrication; Manufacturing processes; Plasma applications; Plasma materials processing; Process control; Real time systems; Semiconductor device manufacture;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Wafer Level Reliability Workshop, 1992. Final Report., 1992 International
Conference_Location :
Lake Tahoe, CA, USA
Type :
conf
DOI :
10.1109/IWLR.1992.657992
Filename :
657992
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2899769
