DocumentCode

2900167

Title

Application of CMOS-Compatible Micro-Hotplates for In-situ Process Monitors

Author

Suehle, John S. ; Gaitan, Michael

Author_Institution

National Institute of Standards and Technology

fYear

1992

fDate

25-28 Oct. 1992

Firstpage

122

Lastpage

132

Keywords

Aluminum; Conductivity; Contacts; Etching; Fabrication; NIST; Silicon; Substrates; Temperature sensors; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Wafer Level Reliability Workshop, 1992. Final Report., 1992 International

Conference_Location

Lake Tahoe, CA, USA

Type

conf

DOI

10.1109/IWLR.1992.657994

Filename

657994