Title :
Multilayered thin film structures as photonic temperature sensors
Author :
Madamopoulos, N. ; Tsigara, A. ; Vainos, N. ; Kaminska, E. ; Piotrowska, A. ; Kibasi, Kahtan
Author_Institution :
Theor. & Phys. Chem. Inst., Nat. Hellenic Res. Found., Athens, Greece
Abstract :
Thin multilayered films fabricated by magnetron sputtering were built and tested as passive optical elements for the measurement of temperature variations. They were studied for their performance and integrated into photonic temperature sensors because they can be remotely operated, which is advantageous in harsh environments, and they are immune to electromagnetic interference (EMI).
Keywords :
integrated optoelectronics; optical fabrication; optical multilayers; optical sensors; optical testing; temperature sensors; thin films; electromagnetic interference; magnetron sputtering; multilayered thin film structure fabrication; passive optical element testing; photonic temperature sensors; sensor performance; Electromagnetic interference; Electromagnetic measurements; Optical films; Optical sensors; Optoelectronic and photonic sensors; Sputtering; Temperature measurement; Temperature sensors; Testing; Thin film sensors;
Conference_Titel :
Lasers and Electro-Optics Europe, 2005. CLEO/Europe. 2005 Conference on
Print_ISBN :
0-7803-8974-3
DOI :
10.1109/CLEOE.2005.1568225
