Title :
Effect of linewidth fluctuations and sidewall roughness in scatterometry
Author :
Schuster, Thomas ; Kenvien, Norbert ; Osten, Wolfgang ; Reinig, Peter ; Moert, Manfred ; Hingst, Thomas ; Mantz, Ulrich
Author_Institution :
Inst. fur Technische Opt., Stuttgart Univ., Germany
Abstract :
We investigated the effect of linewidth fluctuations and sidewall roughness on wavelength spectra in scatterometry using rigorous coupled wave analysis. For both cases the influence of mean values and fluctuations can be separated.
Keywords :
light scattering; optical variables measurement; surface roughness; linewidth fluctuation effect; rigorous coupled wave analysis; scatterometry; sidewall roughness; wavelength spectra; Diffraction gratings; Fluctuations; Libraries; Periodic structures; Radar measurements; Resists; Scanning electron microscopy; Scattering; Silicon; Wavelength measurement;
Conference_Titel :
Lasers and Electro-Optics Europe, 2005. CLEO/Europe. 2005 Conference on
Print_ISBN :
0-7803-8974-3
DOI :
10.1109/CLEOE.2005.1568229
