DocumentCode
2900684
Title
A heterodyne interferometric ellipsometer
Author
Watkins, Lionel R. ; Hoogerland, Maarten D.
Author_Institution
Dept. of Phys., Auckland Univ., New Zealand
fYear
2005
fDate
12-17 June 2005
Firstpage
453
Abstract
Here we describe a heterodyne interferometric ellipsometer that uses an inexpensive semiconductor laser diode as the source. Small wavelength changes caused by modulating the bias current are converted into temporal fringes by arranging the two arms of the interferometer to be of unequal length. Measurements show that the optical properties of a variety of samples can be determined with high accuracy.
Keywords
ellipsometers; ellipsometry; light interferometry; light sources; semiconductor lasers; bias current modulation; heterodyne interferometric ellipsometer; inexpensive semiconductor laser diode; optical property; optical source; temporal fringes; Arm; Atomic measurements; Diode lasers; Glass; Instruments; Optical films; Optical interferometry; Optical polarization; Refractive index; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe, 2005. CLEO/Europe. 2005 Conference on
Print_ISBN
0-7803-8974-3
Type
conf
DOI
10.1109/CLEOE.2005.1568231
Filename
1568231
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