DocumentCode :
2900920
Title :
Thin Oxide Development And Monitoring vehicle
Author :
Messick, Cleston Ray
Author_Institution :
National Semiconductor
fYear :
1992
fDate :
25-28 Oct. 1992
Firstpage :
146
Lastpage :
150
Keywords :
Acceleration; Capacitors; Conductors; Density measurement; Geometry; Monitoring; Semiconductor device manufacture; Testing; Vehicles; Very large scale integration;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Wafer Level Reliability Workshop, 1992. Final Report., 1992 International
Conference_Location :
Lake Tahoe, CA, USA
Type :
conf
DOI :
10.1109/IWLR.1992.657998
Filename :
657998
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2900920
