Title :
Embedded monofilament UV-LIGA techniques for microfabrication of beam tunnels in a 220 GHz wideband serpentine waveguide amplifier
Author :
Joye, Colin D. ; Calame, Jeffrey P. ; Cook, Alan M. ; Nguyen, Khanh T. ; Wright, Edward L. ; Pershing, Dean E. ; Levush, Baruch
Author_Institution :
US Naval Res. Lab., Washington, DC, USA
Abstract :
A 50 watt, wideband serpentine amplifier is under development to demonstrate a novel beam tunnel fabrication technique capable of forming arbitrarily long beam tunnels of very small diameter using a single Ultraviolet Lithography (UV-LIGA) exposure step.
Keywords :
LIGA; microfabrication; millimetre wave amplifiers; wideband amplifiers; arbitrarily long beam tunnels; beam tunnel fabrication technique; embedded monofilament UV-LIGA techniques; frequency 220 GHz; microfabrication; power 50 W; single ultraviolet lithography exposure step; Bandwidth; Copper; Electron beams; Fabrication; Polymers; Resists; Substrates; SU-8; UV-LIGA; beam tunnel; microfabrication; serpentine waveguide;
Conference_Titel :
Vacuum Electronics Conference (IVEC), 2012 IEEE Thirteenth International
Conference_Location :
Monterey, CA
Print_ISBN :
978-1-4673-0188-6
Electronic_ISBN :
978-1-4673-0187-9
DOI :
10.1109/IVEC.2012.6262271
