Title :
Plasma polymers prepared by rf sputtering
Author_Institution :
Fac. of Math. & Phys., Charles Univ., Prague, Czech Republic
Abstract :
The deposition of plasma polymers using radiofrequency sputtering of polymer targets is promising especially in case of fluorocarbon films for various applications. Gaseous organic fragments as precursors for the plasma polymerization process are emitted and fragmented from the conventional polymer target. No gaseous or liquid precursors are needed
Keywords :
polymer films; deposition; fluorocarbon films; gaseous organic fragments; plasma polymerization process; plasma polymers; polymer targets; precursors; radiofrequency sputtering;
Conference_Titel :
Plasma Polymerisation - Processing for the Future (Ref. No. 1999/026), IEE Seminar on
Conference_Location :
London
DOI :
10.1049/ic:19990163
