Title :
Spurious mode suppression in electrostatic comb-drive X-Y microactuators
Author :
Harness, T. ; Syms, Richard R. A.
Author_Institution :
Dept. of Electr. & Electron. Eng., Imperial Coll. of Sci., Technol. & Med., London, UK
Abstract :
In this work, electrostatic comb-drive X-Y microactuators with a twin flexure structure are fabricated by bulk micromachining of boron-doped Si. The experimental results on spurious mode suppression are explained using a coupled-mode model
Keywords :
electrostatic actuators; Si:B; boron doped silicon; bulk micromachining; coupled-mode model; electrostatic comb-drive X-Y microactuator; spurious mode suppression; twin flexure structure;
Conference_Titel :
Microengineering, Modelling and Design (Ref. No. 1999/052), IEE Seminar on
Conference_Location :
London
DOI :
10.1049/ic:19990276
