Title :
Wafer Level Autoclave
Author :
Matosevich, Aviram ; Lisenker, Boris
Author_Institution :
National Semiconductor
Keywords :
Acceleration; Corrosion; Moisture; Packaging; Passivation; Qualifications; Resists; Stress; Testing; Wafer scale integration;
Conference_Titel :
Wafer Level Reliability Workshop, 1992. Final Report., 1992 International
Conference_Location :
Lake Tahoe, CA, USA
DOI :
10.1109/IWLR.1992.658001