DocumentCode :
2902529
Title :
Consistency Of Similarly Designed Wafer Level Reliability test Structures Produced In Multiple Fabrication Areas
Author :
Turner, Timothy E.
Author_Institution :
Turner Engineering Technology
fYear :
1992
fDate :
25-28 Oct. 1992
Firstpage :
215
Lastpage :
219
Keywords :
Automatic testing; BiCMOS integrated circuits; Foundries; Pollution measurement; Semiconductor device modeling; Semiconductor device reliability; Semiconductor process modeling; Silicon; Temperature; Threshold voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Wafer Level Reliability Workshop, 1992. Final Report., 1992 International
Conference_Location :
Lake Tahoe, CA, USA
Type :
conf
DOI :
10.1109/IWLR.1992.658006
Filename :
658006
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2902529
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