Title :
Experimental investigations on miniaturized vacuum electron devices
Author :
Han, Seong-Tae ; Jeon, Seok-Gy ; Shin, Young-Min ; Jang, Kyu-Ha ; So, Jin-Kyu ; Kim, Jong-Hyun ; Chang, Suk-sang ; Park, Gun-Sik
Author_Institution :
Sch. of Phys., Seoul Nat. Univ., South Korea
Abstract :
We investigated foundations for high frequency vacuum electron devices, experimentally with emphasis on LIGA (deep etch X-ray lithography: lithographie, galvanoformung, abformung; German acronyms) to fabricate a miniaturized interaction circuit and a photonic crystal (PC) resonator to excite a stable high order mode. The successful operation of a LIGA-fabricated folded-waveguide traveling-wave tube was reported. From the physical considerations such as Debye length and photonic band gap, we proposed a reflex klystron adopting a cold cathode and a PC resonator.
Keywords :
LIGA; cathodes; klystrons; photonic band gap; photonic crystals; resonators; travelling wave tubes; vacuum microelectronics; Debye length; LIGA; LIGA-fabricated folded-waveguide traveling-wave tube; PC resonator; cold cathode; deep etch X-ray lithography; miniaturized interaction circuit; miniaturized vacuum electron devices; photonic band gap; photonic crystal resonator; reflex klystron; Cathodes; Circuits; Current density; Electron beams; Electron devices; Electron tubes; Elementary particle vacuum; Frequency; Machining; Quantum cascade lasers;
Conference_Titel :
Vacuum Electron Sources Conference, 2004. Proceedings. IVESC 2004. The 5th International
Print_ISBN :
0-7803-8437-7
DOI :
10.1109/IVESC.2004.1414294
