• DocumentCode
    2903100
  • Title

    Microfabrication of wideband distributed beam amplifiers at 220 GHz

  • Author

    Joye, Colin D. ; Calame, Jeffrey P. ; Nguyen, Khanh T. ; Pershing, Dean ; Larsen, Paul B. ; Garven, Morag ; Park, Doewon ; Bass, Robert ; Levush, Baruch

  • Author_Institution
    US Naval Res. Lab., Washington, DC, USA
  • fYear
    2011
  • fDate
    21-24 Feb. 2011
  • Firstpage
    343
  • Lastpage
    344
  • Abstract
    Wideband, distributed beam amplifiers are under development at NRL. We report on microfabrication techniques used to construct several types of millimeter wave planar amplifier circuits using Ultraviolet Lithography (UV-LIGA).
  • Keywords
    distributed amplifiers; microfabrication; millimetre wave amplifiers; ultraviolet lithography; wideband amplifiers; frequency 220 GHz; millimeter wave planar amplifier circuit; ultraviolet lithography; wideband distributed beam amplifier microfabrication; Copper; Dispersion; Gratings; Millimeter wave circuits; Resists; USA Councils; Wideband; SU-8; UV-LIGA; folded waveguide; millimeter wave; slow-wave amplifier;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Electronics Conference (IVEC), 2011 IEEE International
  • Conference_Location
    Bangalore
  • Print_ISBN
    978-1-4244-8662-5
  • Type

    conf

  • DOI
    10.1109/IVEC.2011.5747016
  • Filename
    5747016