DocumentCode
2903100
Title
Microfabrication of wideband distributed beam amplifiers at 220 GHz
Author
Joye, Colin D. ; Calame, Jeffrey P. ; Nguyen, Khanh T. ; Pershing, Dean ; Larsen, Paul B. ; Garven, Morag ; Park, Doewon ; Bass, Robert ; Levush, Baruch
Author_Institution
US Naval Res. Lab., Washington, DC, USA
fYear
2011
fDate
21-24 Feb. 2011
Firstpage
343
Lastpage
344
Abstract
Wideband, distributed beam amplifiers are under development at NRL. We report on microfabrication techniques used to construct several types of millimeter wave planar amplifier circuits using Ultraviolet Lithography (UV-LIGA).
Keywords
distributed amplifiers; microfabrication; millimetre wave amplifiers; ultraviolet lithography; wideband amplifiers; frequency 220 GHz; millimeter wave planar amplifier circuit; ultraviolet lithography; wideband distributed beam amplifier microfabrication; Copper; Dispersion; Gratings; Millimeter wave circuits; Resists; USA Councils; Wideband; SU-8; UV-LIGA; folded waveguide; millimeter wave; slow-wave amplifier;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Electronics Conference (IVEC), 2011 IEEE International
Conference_Location
Bangalore
Print_ISBN
978-1-4244-8662-5
Type
conf
DOI
10.1109/IVEC.2011.5747016
Filename
5747016
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