Title :
Microfabrication of wideband distributed beam amplifiers at 220 GHz
Author :
Joye, Colin D. ; Calame, Jeffrey P. ; Nguyen, Khanh T. ; Pershing, Dean ; Larsen, Paul B. ; Garven, Morag ; Park, Doewon ; Bass, Robert ; Levush, Baruch
Author_Institution :
US Naval Res. Lab., Washington, DC, USA
Abstract :
Wideband, distributed beam amplifiers are under development at NRL. We report on microfabrication techniques used to construct several types of millimeter wave planar amplifier circuits using Ultraviolet Lithography (UV-LIGA).
Keywords :
distributed amplifiers; microfabrication; millimetre wave amplifiers; ultraviolet lithography; wideband amplifiers; frequency 220 GHz; millimeter wave planar amplifier circuit; ultraviolet lithography; wideband distributed beam amplifier microfabrication; Copper; Dispersion; Gratings; Millimeter wave circuits; Resists; USA Councils; Wideband; SU-8; UV-LIGA; folded waveguide; millimeter wave; slow-wave amplifier;
Conference_Titel :
Vacuum Electronics Conference (IVEC), 2011 IEEE International
Conference_Location :
Bangalore
Print_ISBN :
978-1-4244-8662-5
DOI :
10.1109/IVEC.2011.5747016
