DocumentCode :
2903427
Title :
Thermal management: Use of aluminum-nitride multilayer heaters in dispenser cathodes
Author :
Busbaher, Daniel ; Smith, Peter C. ; LeClair, Robert W.
Author_Institution :
Semicon Assoc., Lexington, KY, USA
fYear :
2011
fDate :
21-24 Feb. 2011
Firstpage :
373
Lastpage :
374
Abstract :
Dispenser cathodes must operate at specific temperature while applying specific heater power. To achieve the required temperature a wire coil heater is commonly used. During the heater and cathode design process several aspects (structure rigidness, heat transfer path, uniformity of surface temperature distribution, heater and cathode life) have to be taken under consideration which makes the design difficult and costly. This paper offers an insight into study of aluminum-nitride drop-in heater package as a heating element for dispenser cathodes.
Keywords :
III-V semiconductors; cathodes; coils; multilayers; temperature distribution; thermal management (packaging); wires; aluminum-nitride drop-in heater package; dispenser cathodes; heating element; multilayer heaters; surface temperature distribution; thermal management; wire coil heater; Assembly; Cathodes; Heat transfer; Heating; Nonhomogeneous media; Wire; dispenser cathode; heater; temperature distribution;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Electronics Conference (IVEC), 2011 IEEE International
Conference_Location :
Bangalore
Print_ISBN :
978-1-4244-8662-5
Type :
conf
DOI :
10.1109/IVEC.2011.5747031
Filename :
5747031
Link To Document :
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