Implantable MEMS Accelerometer Microphone for Cochlear Prosthesis

Author

Young, Darrin J. ; Zurcher, Mark A. ; Ko, Wen H. ; Semaan, Maroun ; Megerian, Cliff A.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Case Western Reserve Univ., Cleveland, OH

fYear

2007

fDate

27-30 May 2007

Firstpage

3119

Lastpage

3122

Abstract

A MEMS accelerometer is proposed as an implantable middle ear microphone for future fully implantable cochlear prosthesis. Vibration characterization of human temporal bones by using laser Doppler vibrometer indicates that a MEMS accelerometer needs to achieve a sensing resolution of 75 mug/radicHz with a bandwidth of 10 kHz to detect normal conversation. A prototype MEMS accelerometer is designed and fabricated. When interfaced with a low noise CMOS capacitance-to-voltage converter, the sensor achieves a sensing resolution of 78 mug/radicHz at 500 Hz with a sensitivity of 11.5 mV/g and bandwidth of 6.4 kHz. The overall system attached on umbo demonstrates the capability of detecting normal conversation.

Keywords

CMOS integrated circuits; accelerometers; ear; micromechanical devices; microphones; prosthetics; vibration measurement; 10 kHz; 500 Hz; 6.4 kHz; cochlear prosthesis; human temporal bones; implantable MEMS accelerometer; laser Doppler vibrometer; low noise CMOS capacitance-to-voltage converter; middle ear microphone; normal conversation detection; vibration characterization; Accelerometers; Bandwidth; Bones; Ear; Humans; Laser noise; Micromechanical devices; Microphones; Prosthetics; Vibrometers;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2007. ISCAS 2007. IEEE International Symposium on

Conference_Location

New Orleans, LA

Print_ISBN

1-4244-0920-9

Electronic_ISBN

1-4244-0921-7

Type

conf

DOI

10.1109/ISCAS.2007.378091

Filename

4253339