Title :
Analog microstrip phase shifter using MEMS ground plane elements
Author :
Shafai, C. ; Safari, M. ; Shafai, L.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Manitoba, Winnipeg, MB, Canada
Abstract :
An analog tunable phase shifter is demonstrated that uses MEM elements in the ground plane below a microstrip transmission line. Meander-ribbon MEM elements in the ground plane form a defected ground structure. Electrostatic actuation of the ribbon array introduces an air gap between the RF substrate and ground plane, enabling phase control. Device performance is simulated and measured at 50 GHz for a 5 mm ribbon array and 1 mm thick quartz substrate. Measurements demonstrated analog phase shift control to 86.2° with ΔS21 figure of merit of 30.6 °/dB. Phase shifts from 46.7° - 75.6° showed figure of merit over 100 °/dB.
Keywords :
micromechanical devices; microstrip lines; millimetre wave measurement; millimetre wave phase shifters; MEMS ground plane elements; RF substrate; analog microstrip phase shifter; analog phase shift control; defected ground structure; electrostatic actuation; frequency 50 GHz; meander-ribbon MEM elements; microstrip transmission line; phase control; quartz substrate; ribbon array; size 1 mm; size 5 mm; Arrays; Micromechanical devices; Phase shifters; Power transmission lines; Radio frequency; Substrates; Transmission line measurements; MEMS; analog phase shift; defected ground; electrostatic actuation; figure of merit; microstrip; phase shifter;
Conference_Titel :
Antenna Technology and Applied Electromagnetics (ANTEM), 2012 15th International Symposium on
Conference_Location :
Toulouse
Print_ISBN :
978-1-4673-0290-6
DOI :
10.1109/ANTEM.2012.6262413
