Analog microstrip phase shifter using MEMS ground plane elements

Author

Shafai, C. ; Safari, M. ; Shafai, L.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Manitoba, Winnipeg, MB, Canada

fYear

2012

fDate

25-28 June 2012

Firstpage

1

Lastpage

4

Abstract

An analog tunable phase shifter is demonstrated that uses MEM elements in the ground plane below a microstrip transmission line. Meander-ribbon MEM elements in the ground plane form a defected ground structure. Electrostatic actuation of the ribbon array introduces an air gap between the RF substrate and ground plane, enabling phase control. Device performance is simulated and measured at 50 GHz for a 5 mm ribbon array and 1 mm thick quartz substrate. Measurements demonstrated analog phase shift control to 86.2° with ΔS₂₁ figure of merit of 30.6 °/dB. Phase shifts from 46.7° - 75.6° showed figure of merit over 100 °/dB.

Keywords

micromechanical devices; microstrip lines; millimetre wave measurement; millimetre wave phase shifters; MEMS ground plane elements; RF substrate; analog microstrip phase shifter; analog phase shift control; defected ground structure; electrostatic actuation; frequency 50 GHz; meander-ribbon MEM elements; microstrip transmission line; phase control; quartz substrate; ribbon array; size 1 mm; size 5 mm; Arrays; Micromechanical devices; Phase shifters; Power transmission lines; Radio frequency; Substrates; Transmission line measurements; MEMS; analog phase shift; defected ground; electrostatic actuation; figure of merit; microstrip; phase shifter;

fLanguage

English

Publisher

ieee

Conference_Titel

Antenna Technology and Applied Electromagnetics (ANTEM), 2012 15th International Symposium on

Conference_Location

Toulouse

Print_ISBN

978-1-4673-0290-6

Type

conf

DOI

10.1109/ANTEM.2012.6262413

Filename

6262413