DocumentCode
2904034
Title
Defect Diagnosis - Reasoning Methodology
Author
Sato, Yasuo ; Sugiura, Kazushi ; Shimoda, Reisuke ; Yoshizawa, Yutaka ; Norimatsu, Kenji ; Sanada, Masaru
Author_Institution
Semicond. Technol. Acad. Res. Center, Yokohama
fYear
2006
fDate
20-23 Nov. 2006
Firstpage
209
Lastpage
214
Abstract
Diagnosis has become a crucial technology for early debugging and yield improvement. However, the conventional diagnosis methods are not good at locating the defects that are not precisely expressed only with logical fault models. In this paper, we propose a novel defect diagnosis methodology, which is based on the evaluation of defect behaviors using physical information. We examine suspected nodes\´ voltages by comparing with the observed responses of ATE. In the examination, we use "defect activation", which is an estimation method of defective nodes\´ voltages using physical information. Using this methodology, we introduce examples of diagnosis for open defects in a cell, and for interconnect open defects. Those successful results show the effectiveness of the defect diagnosis
Keywords
automatic test equipment; estimation theory; fault diagnosis; integrated circuit testing; logic testing; ATE; cell open defects; defect activation; defect diagnosis method; defective nodes´ voltages; estimation method; interconnect open defects; physical information; Cause effect analysis; Debugging; Fabrication; Failure analysis; Fault diagnosis; Logic testing; Process design; Voltage; Wires; Wiring;
fLanguage
English
Publisher
ieee
Conference_Titel
Test Symposium, 2006. ATS '06. 15th Asian
Conference_Location
Fukuoka
ISSN
1081-7735
Print_ISBN
0-7695-2628-4
Type
conf
DOI
10.1109/ATS.2006.261022
Filename
4030770
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