• DocumentCode
    2904034
  • Title

    Defect Diagnosis - Reasoning Methodology

  • Author

    Sato, Yasuo ; Sugiura, Kazushi ; Shimoda, Reisuke ; Yoshizawa, Yutaka ; Norimatsu, Kenji ; Sanada, Masaru

  • Author_Institution
    Semicond. Technol. Acad. Res. Center, Yokohama
  • fYear
    2006
  • fDate
    20-23 Nov. 2006
  • Firstpage
    209
  • Lastpage
    214
  • Abstract
    Diagnosis has become a crucial technology for early debugging and yield improvement. However, the conventional diagnosis methods are not good at locating the defects that are not precisely expressed only with logical fault models. In this paper, we propose a novel defect diagnosis methodology, which is based on the evaluation of defect behaviors using physical information. We examine suspected nodes\´ voltages by comparing with the observed responses of ATE. In the examination, we use "defect activation", which is an estimation method of defective nodes\´ voltages using physical information. Using this methodology, we introduce examples of diagnosis for open defects in a cell, and for interconnect open defects. Those successful results show the effectiveness of the defect diagnosis
  • Keywords
    automatic test equipment; estimation theory; fault diagnosis; integrated circuit testing; logic testing; ATE; cell open defects; defect activation; defect diagnosis method; defective nodes´ voltages; estimation method; interconnect open defects; physical information; Cause effect analysis; Debugging; Fabrication; Failure analysis; Fault diagnosis; Logic testing; Process design; Voltage; Wires; Wiring;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Test Symposium, 2006. ATS '06. 15th Asian
  • Conference_Location
    Fukuoka
  • ISSN
    1081-7735
  • Print_ISBN
    0-7695-2628-4
  • Type

    conf

  • DOI
    10.1109/ATS.2006.261022
  • Filename
    4030770