New Trench Depth Measurement System with Wavelength-Rapidly-Scanning Acousto-Optic Tunable Filter for VLSI DRAMs Capacitor Cells

Author

Takada, Kazumasa ; Noda, Juichi ; Nakajima, Sigeru

Author_Institution

NTT Opto-Electronics Laboratory

fYear

1988

fDate

7-10 June 1988

Firstpage

278

Lastpage

279

fLanguage

English

Publisher

ieee

Conference_Titel

Precision Electromagnetic Measurements, 1988. CPEM 88 Digest. 1988 Conference on

Conference_Location

Ibaraki, Japan

Type

DOI

10.1109/CPEM.1988.671295

Filename

671295

Link To Document