Title :
Bending mode cantilever actuators for micro-electromechanical systems
Author :
Morega, A.M. ; Tanase, N. ; Morega, M. ; Comeaga, D. ; Ilie, C.
Author_Institution :
Univ. Politeh. of Bucharest, Bucharest, Romania
Abstract :
This paper presents a bending-mode cantilever actuator (CA) concept for optical devices. Two designs are analyzed in stationary working conditions through numerical simulations, and their deformations under the action of electrodynamic body forces are evaluated. The modal structural analysis and the lumped, electric circuit parameters are also provided. These results may be of interest in the design stage of these CAs.
Keywords :
cantilevers; micro-optomechanical devices; microactuators; modal analysis; bending mode cantilever actuators; bending-mode CA concept; electrodynamic body forces; lumped electric circuit parameters; microelectromechanical systems; modal structural analysis; numerical simulations; optical devices; Actuators; Blades; Electrostatics; Magnetic domains; Magnetic fields; Magnetic flux; Magnetomechanical effects; cantilever; finite element method; magnetic microactuator; mathematical modeling; modal analysis; numerical simulation; planar spiral coil; stationary analysis;
Conference_Titel :
Advanced Topics in Electrical Engineering (ATEE), 2015 9th International Symposium on
Conference_Location :
Bucharest
DOI :
10.1109/ATEE.2015.7133869
