A MEMS dosimeter comprising diamond for very high neutron fluence

The construct and modeled performance of a bi-layer cantilever beam type device which can serve as a dosimeter for very high neutron fluence environments such as nuclear or fusion applications is described. A layer of material such as molybdenum is fabricated integral to a microelectronics scaled CVD diamond cantilever beam such that, as it is irradiated, the layer swells in a predictable manner due to radiation damage, creating a changing state of strain in the bi-layer beam proportional to the fluence. The more the neutron fluence, the larger is the strain and hence the greater the deflection of the beam. This effect is, by the MEMS design and construct, tied to a variable displacement air gap plate capacitor such that the change in capacitance provides a direct measure of fluence.