Title :
An Edge-View-Photodetector for Simplification of Optical Packaging
Author :
Li, Zhihua ; Shen, Huajun ; Yang, Chengyue ; Li, Baoxia ; Wan, Lixi
Author_Institution :
Chinese Acad. of Sci., Beijing
Abstract :
A new 850 nm edge-view-photodetector (EVPD) was designed, fabricated and measured. The EVPD is designed to simplify optical packagings in an optical interconnects system by eliminating the using of turning mirrors and microlenses. The PIN active area of the photodetector is fabricated on a sloping sidewall of mesa structures. The resulting photodetector becomes edge viewing while the electrical pads remain horizontal. The EVPD fabrication process and initial measurement results are presented in this letter. The main processing steps include deep anisotropic chemical etching, material growth on slope and lithography on 3-D micro structure.
Keywords :
etching; lithography; microlenses; micromirrors; packaging; photodetectors; 3D microstructure lithography; anisotropic chemical etching; edge-view-photodetector; electrical pads; material growth; microlenses; optical packaging; turning mirrors; Anisotropic magnetoresistance; Lenses; Microoptics; Mirrors; Optical design; Optical device fabrication; Optical interconnections; Packaging; Photodetectors; Turning; 3-D microstructure; EVPD; epitaxy; optical interconnect; optical packaging;
Conference_Titel :
Electronic Packaging Technology, 2007. ICEPT 2007. 8th International Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-1392-8
Electronic_ISBN :
978-1-4244-1392-8
DOI :
10.1109/ICEPT.2007.4441491
