Micromachined components for ultrasonic transducers and scanners

Author

Farlow, Roger ; Galbraith, Walter ; Puccio, Jessica ; Hayward, Gordon

Author_Institution

Dept. of Electron. & Electr. Eng., Strathclyde Univ., Glasgow, UK

Volume

2

fYear

2003

fDate

5-8 Oct. 2003

Firstpage

1296

Abstract

Customised theoretical methods, computer models and laser micromachining techniques have been developed as tools that are currently being employed in research concerning the design and fabrication of novel ultrasonic transducers, as well as a miniature scanner driven by particularly simple type of ultrasonic motor. All of the current work involves laser cutting, milling and drilling of piezoceramics, piezopolymers and single crystal piezoelectric materials.

Keywords

finite element analysis; micromachining; piezoceramics; piezoelectric materials; ultrasonic motors; ultrasonic transducers; computer models; laser cutting; laser micromachining; micromachined components; miniature scanner; piezoceramics drilling; piezoceramics milling; piezopolymers; single crystal piezoelectric materials; theoretical methods; ultrasonic motor; ultrasonic scanners; ultrasonic transducers; Laser beam cutting; Laser modes; Laser theory; Micromachining; Micromotors; Milling; Optical design; Optical device fabrication; Piezoelectric materials; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics, 2003 IEEE Symposium on

Print_ISBN

0-7803-7922-5

Type

conf

DOI

10.1109/ULTSYM.2003.1293140

Filename

1293140