Title :
Micromachined components for ultrasonic transducers and scanners
Author :
Farlow, Roger ; Galbraith, Walter ; Puccio, Jessica ; Hayward, Gordon
Author_Institution :
Dept. of Electron. & Electr. Eng., Strathclyde Univ., Glasgow, UK
Abstract :
Customised theoretical methods, computer models and laser micromachining techniques have been developed as tools that are currently being employed in research concerning the design and fabrication of novel ultrasonic transducers, as well as a miniature scanner driven by particularly simple type of ultrasonic motor. All of the current work involves laser cutting, milling and drilling of piezoceramics, piezopolymers and single crystal piezoelectric materials.
Keywords :
finite element analysis; micromachining; piezoceramics; piezoelectric materials; ultrasonic motors; ultrasonic transducers; computer models; laser cutting; laser micromachining; micromachined components; miniature scanner; piezoceramics drilling; piezoceramics milling; piezopolymers; single crystal piezoelectric materials; theoretical methods; ultrasonic motor; ultrasonic scanners; ultrasonic transducers; Laser beam cutting; Laser modes; Laser theory; Micromachining; Micromotors; Milling; Optical design; Optical device fabrication; Piezoelectric materials; Ultrasonic transducers;
Conference_Titel :
Ultrasonics, 2003 IEEE Symposium on
Print_ISBN :
0-7803-7922-5
DOI :
10.1109/ULTSYM.2003.1293140
