Focusing nondiffracting BAW transducer

Author

Salo, Janne ; Salomaa, Martti M.

Author_Institution

Mater. Phys. Lab., Helsinki Univ. of Technol., Finland

Volume

2

fYear

2003

fDate

5-8 Oct. 2003

Firstpage

1436

Abstract

We present a detailed scheme for piezoelectric interdigital-type transducer on quartz that would generate a localized nondiffracting beam within the depth of a crystal. The transducer is analogous with optical diffractive elements but the presence of anisotropy and several acoustic modes complicates the design, and numerical modeling is required for the final optimization of the local transducer structure. The transducer proposed is suited for focusing the acoustic wave energy within a small volume inside the crystal at the depth of 500 μm below the surface. For a water of that same thickness, the produced wave pattern may be verified on the opposite surface of the wafer.

Keywords

beam handling techniques; bulk acoustic wave devices; circuit optimisation; diffractive optical elements; interdigital transducers; 500 microns; acoustic modes; acoustic wave focusing; anisotropy modes; focusing BAW transducer; local transducer structure; localized nondiffracting beam; nondiffracting BAW transducer; optical diffractive elements; piezoelectric interdigital-type transducer; wave pattern; Acoustic beams; Acoustic diffraction; Acoustic transducers; Anisotropic magnetoresistance; Geometrical optics; Optical design; Optical diffraction; Optical surface waves; Piezoelectric transducers; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics, 2003 IEEE Symposium on

Print_ISBN

0-7803-7922-5

Type

conf

DOI

10.1109/ULTSYM.2003.1293174

Filename

1293174