Title :
2D model of solidly-mounted and membrane BAW devices
Author :
Milsom, R.F. ; Löbl, H.P. ; Metzmacher, C. ; Lok, P. ; Tuinhout, A. ; van Straten, F.
Author_Institution :
Philips Res. Labs., Redhill, UK
Abstract :
A 2D analytical model of FBAR and SBAR devices is described in outline. A 1D model reported previously is extended by the inclusion of terms characterising acoustic modes guided by the thin-film layers. This provides understanding of loss and ripple not accounted for in 1D.
Keywords :
acoustic resonators; bulk acoustic wave devices; semiconductor device models; thin films; 1D model; 2D model; FBAR; SBAR; acoustic modes; film BAW resonator; membrane BAW devices; solidly-mounted BAW devices; solidly-mounted BAW resonator; thin-film layers; Acoustic scattering; Analytical models; Biomembranes; Bulk acoustic wave devices; Electrodes; Film bulk acoustic resonators; Reflection; Resonance; Resonator filters; Solid modeling;
Conference_Titel :
Ultrasonics, 2003 IEEE Symposium on
Print_ISBN :
0-7803-7922-5
DOI :
10.1109/ULTSYM.2003.1293263
