DocumentCode
2907559
Title
MEMS in metrology, metrology in MEMS
Author
Jachowicz, Ryszard S.
Author_Institution
Warsaw University of Technology, Poland
fYear
2007
fDate
1-3 May 2007
Keywords
Actuators; Atomic force microscopy; Chemical sensors; Manufacturing; Mechanical systems; Metrology; Micromechanical devices; Semiconductor device measurement; Sensor systems; Time measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Instrumentation and Measurement Technology Conference Proceedings, 2007. IMTC 2007. IEEE
Conference_Location
Warsaw, Poland
ISSN
1091-5281
Print_ISBN
1-4244-0588-2
Type
conf
DOI
10.1109/IMTC.2007.379268
Filename
4258019
Link To Document