مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

2907559

Title :

MEMS in metrology, metrology in MEMS

Author :

Jachowicz, Ryszard S.

Author_Institution :

Warsaw University of Technology, Poland

fYear :

2007

fDate :

1-3 May 2007

Keywords :

Actuators; Atomic force microscopy; Chemical sensors; Manufacturing; Mechanical systems; Metrology; Micromechanical devices; Semiconductor device measurement; Sensor systems; Time measurement;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Instrumentation and Measurement Technology Conference Proceedings, 2007. IMTC 2007. IEEE

Conference_Location :

Warsaw, Poland

ISSN :

1091-5281

Print_ISBN :

1-4244-0588-2

Type :

conf

DOI :

10.1109/IMTC.2007.379268

Filename :

4258019

Link To Document :

https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2907559