• DocumentCode
    2907943
  • Title

    Growth of InP and In1-xGaxP crystals by the vertical gradient freeze method with a submerged heater

  • Author

    Iseler, G.W. ; Bryant, G.G. ; Bliss, D.F.

  • Author_Institution
    Air Force Res. Lab., Hanscom AFB, Bedford, MA, USA
  • fYear
    1999
  • fDate
    1999
  • Firstpage
    255
  • Lastpage
    258
  • Abstract
    We report the high-pressure growth of doped InP and In1-x GaxP crystals by the vertical gradient-freeze method modified with the addition of a submerged heater. The submerged heater, which fits closely into the growth ampoule, effectively isolates two melt zones during growth to provide a constant doping concentration or alloy composition in the lower one, and therefore also in the crystal. The upper melt is encapsulated with B2O3. Since the submerged heater suppresses melt convection, it should also reduce the twinning frequency that is so troublesome for InP growth. The density of defects that result from excessive hoop stresses should also be reduced due to the essentially planar isotherm that is created near the solid-liquid interface by the submerged heater. The payoff could be a greatly improved yield of nearly unstrained InP wafers with lower defect density and more uniform electrical properties
  • Keywords
    III-V semiconductors; crystal growth from melt; doping profiles; gallium compounds; indium compounds; semiconductor doping; semiconductor growth; tin; twinning; InGaP:Sn; InP:Sn; crystal growth; defect density; doping concentration; high-pressure growth; hoop stresses; planar isotherm; submerged heater; twinning frequency; unstrained InP wafers; vertical gradient freezing; Crystals; Hydrogen; Indium phosphide; Insulation; Steel; Temperature; Tin; Wavelength measurement; Wire; Wrapping;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Indium Phosphide and Related Materials, 1999. IPRM. 1999 Eleventh International Conference on
  • Conference_Location
    Davos
  • ISSN
    1092-8669
  • Print_ISBN
    0-7803-5562-8
  • Type

    conf

  • DOI
    10.1109/ICIPRM.1999.773683
  • Filename
    773683