DocumentCode :
2907943
Title :
Growth of InP and In1-xGaxP crystals by the vertical gradient freeze method with a submerged heater
Author :
Iseler, G.W. ; Bryant, G.G. ; Bliss, D.F.
Author_Institution :
Air Force Res. Lab., Hanscom AFB, Bedford, MA, USA
fYear :
1999
fDate :
1999
Firstpage :
255
Lastpage :
258
Abstract :
We report the high-pressure growth of doped InP and In1-x GaxP crystals by the vertical gradient-freeze method modified with the addition of a submerged heater. The submerged heater, which fits closely into the growth ampoule, effectively isolates two melt zones during growth to provide a constant doping concentration or alloy composition in the lower one, and therefore also in the crystal. The upper melt is encapsulated with B2O3. Since the submerged heater suppresses melt convection, it should also reduce the twinning frequency that is so troublesome for InP growth. The density of defects that result from excessive hoop stresses should also be reduced due to the essentially planar isotherm that is created near the solid-liquid interface by the submerged heater. The payoff could be a greatly improved yield of nearly unstrained InP wafers with lower defect density and more uniform electrical properties
Keywords :
III-V semiconductors; crystal growth from melt; doping profiles; gallium compounds; indium compounds; semiconductor doping; semiconductor growth; tin; twinning; InGaP:Sn; InP:Sn; crystal growth; defect density; doping concentration; high-pressure growth; hoop stresses; planar isotherm; submerged heater; twinning frequency; unstrained InP wafers; vertical gradient freezing; Crystals; Hydrogen; Indium phosphide; Insulation; Steel; Temperature; Tin; Wavelength measurement; Wire; Wrapping;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Indium Phosphide and Related Materials, 1999. IPRM. 1999 Eleventh International Conference on
Conference_Location :
Davos
ISSN :
1092-8669
Print_ISBN :
0-7803-5562-8
Type :
conf
DOI :
10.1109/ICIPRM.1999.773683
Filename :
773683
Link To Document :
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