DocumentCode
2907943
Title
Growth of InP and In1-xGaxP crystals by the vertical gradient freeze method with a submerged heater
Author
Iseler, G.W. ; Bryant, G.G. ; Bliss, D.F.
Author_Institution
Air Force Res. Lab., Hanscom AFB, Bedford, MA, USA
fYear
1999
fDate
1999
Firstpage
255
Lastpage
258
Abstract
We report the high-pressure growth of doped InP and In1-x GaxP crystals by the vertical gradient-freeze method modified with the addition of a submerged heater. The submerged heater, which fits closely into the growth ampoule, effectively isolates two melt zones during growth to provide a constant doping concentration or alloy composition in the lower one, and therefore also in the crystal. The upper melt is encapsulated with B2O3. Since the submerged heater suppresses melt convection, it should also reduce the twinning frequency that is so troublesome for InP growth. The density of defects that result from excessive hoop stresses should also be reduced due to the essentially planar isotherm that is created near the solid-liquid interface by the submerged heater. The payoff could be a greatly improved yield of nearly unstrained InP wafers with lower defect density and more uniform electrical properties
Keywords
III-V semiconductors; crystal growth from melt; doping profiles; gallium compounds; indium compounds; semiconductor doping; semiconductor growth; tin; twinning; InGaP:Sn; InP:Sn; crystal growth; defect density; doping concentration; high-pressure growth; hoop stresses; planar isotherm; submerged heater; twinning frequency; unstrained InP wafers; vertical gradient freezing; Crystals; Hydrogen; Indium phosphide; Insulation; Steel; Temperature; Tin; Wavelength measurement; Wire; Wrapping;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 1999. IPRM. 1999 Eleventh International Conference on
Conference_Location
Davos
ISSN
1092-8669
Print_ISBN
0-7803-5562-8
Type
conf
DOI
10.1109/ICIPRM.1999.773683
Filename
773683
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