Title :
Precise Laser Ablation with Ultra-Short Pulses
Author :
Momma, C. ; Nolte, S. ; Chichkov, B. ; Tunnermann, Andreas ; von Alvensleben, F.
Keywords :
Atomic force microscopy; Laser ablation; Materials processing; Optical materials; Optical pulses; Optical surface waves; Pulse amplifiers; Scanning electron microscopy; Solid lasers; Surface topography;
Conference_Titel :
Lasers and Electro-optics Europe, 1996. CLEO/Europe., Conference on
Conference_Location :
Hamburg, Germany
Print_ISBN :
0-7803-3169-9
DOI :
10.1109/CLEOE.1996.562552