Title :
A tutorial on laser interferometry for precision measurements
Author :
Loughridge, Russell ; Abramovitch, Daniel Y.
Author_Institution :
Nano Position & Meas. Div., Agilent Technol., Cleveland, OH, USA
Abstract :
Laser interferometers have found wide usage in a variety of precision measurement applications. The ability to gain precise position information with minimal change to the dynamics of the device being measured has a large set of advantages. This allows interferometer systems to be used in feedback loops for precision systems. This paper presents a tutorial on laser interferometers, their use in precision motion feedback systems, the issues faced by such systems, and some of the solutions that have been applied to these issues.
Keywords :
Michelson interferometers; light interferometry; position measurement; feedback loops; laser interferometers; laser interferometry; precision measurements; precision motion feedback systems; Detectors; Interference; Interferometers; Laser beams; Measurement by laser beam; Mirrors; Vectors;
Conference_Titel :
American Control Conference (ACC), 2013
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4799-0177-7
DOI :
10.1109/ACC.2013.6580402
