Challenges of MEMS device characterization in engineering development and final manufacturing

Author

Maudie, Theresa ; Miller, Todd ; Nielsen, Rick ; Wallace, Dan ; Ruehs, Terry ; Zehrbach, Dave

Author_Institution

Div. of Sensor Products, Motorola Inc., Phoenix, AZ, USA

fYear

1998

fDate

24-27 Aug 1998

Firstpage

164

Lastpage

170

Abstract

Testing of microelectromechanical systems (MEMS) devices is rapidly progressing to the point that high volume, cost effective, and accurate measurement systems are necessary. This area of automatic test is very challenging compared to a normal semiconductor portfolio. Besides the typical electrical and thermal stimulus, a MEMS measurement system requires control of the quantity, property, or condition to be measured. Information on MEMS related testing issue including input stimuli and output responses are presented. A definition for a MEMS characterization system is proposed. Additionally, future demands based on a expanding product portfolio are discussed

Keywords

automatic test equipment; automatic testing; electronic equipment testing; intelligent sensors; micromechanical devices; MEMS device; MEMS measurement; MEMS testing; automatic test; electrical stimulus; engineering development; final manufacturing; input stimuli; microelectromechanical systems; output responses; product portfolio; semiconductor portfolio; thermal stimulus; Automatic testing; Costs; Electric variables measurement; Microelectromechanical devices; Microelectromechanical systems; Micromechanical devices; Portfolios; Semiconductor device testing; System testing; Volume measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

AUTOTESTCON '98. IEEE Systems Readiness Technology Conference., 1998 IEEE

Conference_Location

Salt Lake City, UT

ISSN

1088-7725

Print_ISBN

0-7803-4420-0

Type

conf

DOI

10.1109/AUTEST.1998.713439

Filename

713439