Title :
Challenges of MEMS device characterization in engineering development and final manufacturing
Author :
Maudie, Theresa ; Miller, Todd ; Nielsen, Rick ; Wallace, Dan ; Ruehs, Terry ; Zehrbach, Dave
Author_Institution :
Div. of Sensor Products, Motorola Inc., Phoenix, AZ, USA
Abstract :
Testing of microelectromechanical systems (MEMS) devices is rapidly progressing to the point that high volume, cost effective, and accurate measurement systems are necessary. This area of automatic test is very challenging compared to a normal semiconductor portfolio. Besides the typical electrical and thermal stimulus, a MEMS measurement system requires control of the quantity, property, or condition to be measured. Information on MEMS related testing issue including input stimuli and output responses are presented. A definition for a MEMS characterization system is proposed. Additionally, future demands based on a expanding product portfolio are discussed
Keywords :
automatic test equipment; automatic testing; electronic equipment testing; intelligent sensors; micromechanical devices; MEMS device; MEMS measurement; MEMS testing; automatic test; electrical stimulus; engineering development; final manufacturing; input stimuli; microelectromechanical systems; output responses; product portfolio; semiconductor portfolio; thermal stimulus; Automatic testing; Costs; Electric variables measurement; Microelectromechanical devices; Microelectromechanical systems; Micromechanical devices; Portfolios; Semiconductor device testing; System testing; Volume measurement;
Conference_Titel :
AUTOTESTCON '98. IEEE Systems Readiness Technology Conference., 1998 IEEE
Conference_Location :
Salt Lake City, UT
Print_ISBN :
0-7803-4420-0
DOI :
10.1109/AUTEST.1998.713439
